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Scanning Probe microscopy for nanostructures investigations from micro and nanoelectronics up to biomaterials
Authors
	Bykov V.A.
	Bykov A.V.
	Bobrov Y.A.
	Kotov V.V.
	Leesment S.I.
	Polyakov V.V.
Date of publication
	2022
DOI
	10.31114/2078-7707-2022-3-146-149
Abstract
	The article describes the modern capabilities of scanning probe microscopes for studying the properties and metrological control of surfaces and nanostructures, including micro and nanoelectronic products and biostructures.
Keywords
	scanning tunneling microscope, STM, scanning atomic force microscope, AFM, scanning probe microscope, SPM, Raman scattering, Raman spectroscopy, ultra-high resolution Raman microscopy, near-field optical microscopy, apertureless scanning probe microscopy of the near field, cantilever, cartridge, nanotechnology, metrology, metrology nanometrology, nanoelectronics.
Library reference
	Bykov V.A., Bykov A.V., Bobrov Y.A., Kotov V.V., Leesment S.I., Polyakov V.V. Scanning Probe microscopy for nanostructures investigations from micro and nanoelectronics up to biomaterials // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2022. Issue 3. P. 146-149. doi:10.31114/2078-7707-2022-3-146-149
URL of paper
	http://www.mes-conference.ru/data/year2022/pdf/D051.pdf