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Possibilities of metrological systems of atomic force microscopy for research, development and control of parameters of micro and nanoelectronic products
Authors
	Bykov V.A.
	Bykov A.V.
	Bobrov Y.A.
	Kotov V.V.
	Leesment S.I.
	Polyakov V.V.
Date of publication
	2020
DOI
	10.31114/2078-7707-2020-4-187-192
Abstract
	The article describes the modern capabilities of scanning probe microscopes for studying the properties and metrological control of surfaces and nanostructures, including micro and nanoelectronic products.
Keywords
	scanning tunneling microscope, STM, scanning atomic force microscope, AFM, scanning probe microscope, SPM, Raman scattering, Raman spectroscopy, ultra-high resolution Raman microscopy, near-field optical microscopy, apertureless scanning probe microscopy of the near field, cantilever, cartridge, nanotechnology, metrology, metrology nanometrology, nanoelectronics.
Library reference
	Bykov V.A., Bykov A.V., Bobrov Y.A., Kotov V.V., Leesment S.I., Polyakov V.V. Possibilities of metrological systems of atomic force microscopy for research, development and control of parameters of micro and nanoelectronic products // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2020. Issue 4. P. 187-192. doi:10.31114/2078-7707-2020-4-187-192
URL of paper
	http://www.mes-conference.ru/data/year2020/pdf/D097.pdf