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| New Algorithm for the 2D Capacitance calculation in the interconnect parasitic extraction problem |
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| Authors |
| | Bojko A.Ya. |
| | Bezrukov A.E. |
| | Rusakov A.S. |
| | Tkachev D.F. |
| | Khapaev M.M. |
| Date of publication |
| | 2006 |
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| Abstract |
| | In this paper we present a new algorithm and results of the new program (N2D) for the 2D capacitance calculation. A new algorithm is based on the Galerkin method and has got high accuracy even for relatively rough discretization of the integral Laplace equation. We developed several strategies for the penalization refinement optimized for the parasitic capacitance calculation. The new algorithm provides with the fast and accurate derivatives to geometric parameters, which is highly desirable for the variability analysis. |
| Keywords |
| | parasitic capacitance extraction, boundary element method, fast sensitivity computation |
| Library reference |
| | Bojko A.Ya., Bezrukov A.E., Rusakov A.S., Tkachev D.F., Khapaev M.M. New Algorithm for the 2D Capacitance calculation in the interconnect parasitic extraction problem // Problems of Perspective Microelectronic Systems Development - 2006. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2006. P. 76-80. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2006/12.pdf |
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