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The process flow simulation of the cathode-grid system and its emission properties
Authors
	Djuzhev N.A.
	Makhiboroda M.A.
	Gusev Ye.
	Gryazneva T.
	Demin G.D.
Date of publication
	2016
Abstract
	In work the results TCAD simulation software package process of creating a cathode-grid system (CGS), which consists of a field emission cathode, and grid control electrodes. Presented by process of forming and sharpening needle cathode based on a standard silicon wafer processing technologies group. The proposed process route allows the dissection areas in the self-alignment of emitter layer grid operations without costly photolithography or chemical-mechanical polishing. On the basis of structure CGS in TCAD using means of COMSOL Multiphysics performed calculation of current-voltage characteristics of a field emission triode, which are in good agreement with experimental measurements in field emission triode obtained by specially designed for this purpose the measuring stand.
Keywords
	field emission, cathode-grid system, vacuum integrated circuit, current density, TCAD
Library reference
	Djuzhev N.A., Makhiboroda M.A., Gusev Ye., Gryazneva T., Demin G.D. The process flow simulation of the cathode-grid system and its emission properties // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2016. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2016. Part 4. P. 37-42.
URL of paper
	http://www.mes-conference.ru/data/year2016/pdf/D159.pdf