| Infrared focal plane arrays (FPA) with thermopile thermal radiation MEMS sensors |
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| Authors |
| | Khafizov R.Z. |
| Date of publication |
| | 2014 |
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| Abstract |
| | The state and prospects in developments of IRFPA with thermopile thermal radiation MEMS sensors were considered. The analysis of thermocouple MEMS sensitive elements on the base of CMOS materials and technology was made. |
| Keywords |
| | Seebeck effect, thermal radiation, microelectromechanical system (MEMS), infrared (IR)detector, IR MEMS sensor. |
| Library reference |
| | Khafizov R.Z. Infrared focal plane arrays (FPA) with thermopile thermal radiation MEMS sensors // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2014. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2014. Part 2. P. 193-196. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2014/pdf/D135.pdf |
