Simulation of unsteady modes of thermal microsensors

Kozlov, A.G.

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Authors

Kozlov A.G.

Date of publication

2012

Abstract

An analytical method is developed to determine the frequency response of thermal microsensors with cantilever, bridge or membrane thermally isolated structures. In the microsensors, the domains of modeling are marked out. These domains are divided into the equivalent regions with homogeneous parameters depending on a number of the layers and the heat generating conditions. For each region, the non-steady-state heat conduction equation is obtained that is solved by means of the time Fourier transform. The heat flux densities between the regions are determined using adjoint boundary conditions in the frequency domain. The analytical expressions for the frequency response of the microsensors are obtained. The method is applied to the concrete thermal radiation microsensors, for which the modulus and argument of the frequency response and the time dependence of the temperature of hot thermojunctions for the impulse input radiation are determined.

Keywords

thermal microsensor, temperature distribution, Fourier transform, frequency response, thermal radiation microsensor

Library reference

Kozlov A.G. Simulation of unsteady modes of thermal microsensors // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2012. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2012. P. 662-667.

URL of paper

http://www.mes-conference.ru/data/year2012/pdf/D145.pdf