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IR photosensitive MEMS elements
Authors
	Fetisov E.A.
	Khafizov R.Z.
	Belin A.M.
	Rudakov G.A.
	Zolotarev V.I.
	Fedirko V.A.
	Rygalin D.B.
Date of publication
	2012
Abstract
	Design features of photosensitive cells for MEMS IR room temperature smart sensors are considered.
Keywords
	MEMS, IR photosensitive MEMS elements, bimorph microcantilever, smart sensor
Library reference
	Fetisov E.A., Khafizov R.Z., Belin A.M., Rudakov G.A., Zolotarev V.I., Fedirko V.A., Rygalin D.B. IR photosensitive MEMS elements // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2012. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2012. P. 658-661.
URL of paper
	http://www.mes-conference.ru/data/year2012/pdf/D90.pdf