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Problems of using device-technological simulation as tool of designing and ways of their solution
Authors
	Korolev M.A.
	Krupkina T.Yu.
	Chaplygin Yu.A.
Date of publication
	2005
Abstract
	Problems of using device-technological simulation as tool of designing and ways of their solution
Keywords
	device-technological simulation
Library reference
	Korolev M.A., Krupkina T.Yu., Chaplygin Yu.A. Problems of using device-technological simulation as tool of designing and ways of their solution // Problems of Perspective Microelectronic Systems Development - 2005. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2005. P. 143-150.
URL of paper
	http://www.mes-conference.ru/data/year2005/21.doc