| Development and designing of integrated thermoelements |
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| Authors |
| | Amelichev V.V. |
| | Polomoshnov S.A. |
| | Chaplygin Yu.A. |
| Date of publication |
| | 2006 |
|
| Abstract |
| | In work bases of designing of integrated thermoelements and thermomicrosystem on their basis are presented. The constructive-technological basis for creation thermomicrosystem with small power consumption (0,5-30 mWt) is shown. Feature of basis is the opportunity of integration of thermoelements with silicon microcircuits on one crystal. |
| Keywords |
| | integrated thermoelements |
| Library reference |
| | Amelichev V.V., Polomoshnov S.A., Chaplygin Yu.A. Development and designing of integrated thermoelements // Problems of Perspective Microelectronic Systems Development - 2006. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2006. P. 416-420. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2006/76.pdf |
