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Grigoryev Yu.N.

Institute of Computational Technologies, Russian Academy of Sciences, Siberian Branch

Listing of all the works of the author. Click on the work title to get the full information.

2012
		Grigoryev Yu.N., Gorobchuk A.G. Modeling of plasma-chemical etching technology in RF discharge
2014
		Gorobchuk A.G., Grigoryev Yu.N. Modeling of plasma-chemical etching technology in CF4/H2 mixture