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Evsikov I.D.

MIET

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2022 
  Evsikov I.D., Demin G.D., Djuzhev N.A., Fetisov E.A., Khafizov R.Z.
TCAD Simulation of the Etching of the Sacrificial Layer in the Sensitive Element of the IR Microbolometer Array Based on the SOI Structure
 

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