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Institute of Computational Technologies, Russian Academy of Sciences, Siberian Branch

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Listing of all the works of the organization. Click on the work title to get the full information.

2012
		Grigoryev Yu.N., Gorobchuk A.G. Modeling of plasma-chemical etching technology in RF discharge
2014
		Gorobchuk A.G., Grigoryev Yu.N. Modeling of plasma-chemical etching technology in CF4/H2 mixture