| Design and Testing of Integrated Circuit for Micromechanical Accelerometer |
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| Authors |
| | Belyaev Ya.V. |
| | Kostygov D.V. |
| | Lemko I.V. |
| | Mikhteeva A. |
| | Nevirkovets N.N. |
| Date of publication |
| | 2018 |
| DOI |
| | 10.31114/2078-7707-2018-4-49-56 |
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| Abstract |
| | Design and testing of an integrated circuit for a micromechanical accelerometer is considered. The design stages of the integrated circuit starting from the system model of the accelerometer and ending with the topology of the integrated circuit are shown. The results of testing the integrated circuit are given. |
| Keywords |
| | integrated circuit, microelectronics, microelectromechanical sensors, microelectromechanical systems |
| Library reference |
| | Belyaev Ya.V., Kostygov D.V., Lemko I.V., Mikhteeva A., Nevirkovets N.N. Design and Testing of Integrated Circuit for Micromechanical Accelerometer // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2018. Issue 4. P. 49-56. doi:10.31114/2078-7707-2018-4-49-56 |
| URL of paper |
| | http://www.mes-conference.ru/data/year2018/pdf/D056.pdf |
