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| Design Principles and Numerical Simulation of Microthermomechanical IR Imagers with Optical Readout |
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| Authors |
| | Belin A.M. |
| | Belin M.A. |
| | Fedirko V.A. |
| | Fetisov E.A. |
| | Khafizov R.Z. |
| Date of publication |
| | 2014 |
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| Abstract |
| | Fundamental aspects of the design of uncooled IR imagers based on thermo-mechanical micro-detectors with optical readout are considered. Their potential advantages are specified. The results of theoretical and computer simulation of micro-thermo-mechanical elements for such systems are presented. |
| Keywords |
| | IR imagers, thermo-mechanical IR-detector, optical readout, MEMS-technology, matrix IR-detector design, theoretical and computer simulation. |
| Library reference |
| | Belin A.M., Belin M.A., Fedirko V.A., Fetisov E.A., Khafizov R.Z. Design Principles and Numerical Simulation of Microthermomechanical IR Imagers with Optical Readout // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2014. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2014. Part 2. P. 189-192. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2014/pdf/D096.pdf |
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