| Accuracy and adequacy of the analytical modeling of the temperature distribution in thermal microsystems |
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| Authors |
| | Kozlov A.G. |
| Date of publication |
| | 2014 |
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| Abstract |
| | The method is presented which allows one to estimate the errors of the analytical modeling of
the temperature distribution in thermal microsystems due to the replacement of real multilayer structures of the zones by the equivalent structures with uniform parameters and due to using the conjugation conditions for zones with different thicknesses. The method is based on the analytical modeling of the temperature distribution over the thickness in real and equivalent structures of the thermal microsystem. Every two-dimensional structure is divided into a number of rectangular regions, in which the temperature distributions are determined by the eigenfunction method. Comparing the temperature distributions in these structures the weighted average relative error of simulation is determined. The dependences of the error of the temperature distribution on the length of zones for different thermal conductivity of layer materials are obtained. A comparison of the temperature distributions in the real structure of the thermal microsystem obtained by the thermal imaging system and the simulation is conducted. |
| Keywords |
| | thermal microsystem, temperature distribution, eigenfunction method, modeling error, modeling adequacy |
| Library reference |
| | Kozlov A.G. Accuracy and adequacy of the analytical modeling of the temperature distribution in thermal microsystems // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2014. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2014. Part 2. P. 167-172. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2014/pdf/D093.pdf |
