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| Membrane-based thermal flow sensor working on calorimetric principle |
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| Authors |
| | Bespalov V.A. |
| | Vasilev I.A. |
| | Djuzhev N.A. |
| | Mazurkin N.S. |
| | Novikov D.V. |
| | Popkov A.F. |
| Date of publication |
| | 2014 |
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| Abstract |
| | In this paper the membrane-based thermal flow sensor working on calorimetric principle is considered. We investigated the sensor design parameters impact on the output characteristics. By methods of numerical simulation the optimal design of the thermal flow sensor were calculated. Based on this results experimental sample was created. The results of simulation and experiment are presented and compared. The obtained data may be used for selecting design of thermal flow sensor for a specific purpose. |
| Keywords |
| | Thermal flow sensor, thermoresistor, MEMS, simulation. |
| Library reference |
| | Bespalov V.A., Vasilev I.A., Djuzhev N.A., Mazurkin N.S., Novikov D.V., Popkov A.F. Membrane-based thermal flow sensor working on calorimetric principle // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2014. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2014. Part 2. P. 185-188. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2014/pdf/D061.pdf |
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