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Researching VLSI RAM 8Ê on the basis of SoS structures
Authors
	Alieva N.V.
	Belous A.I.
	Malyshev V.S.
	Soroka S.A.
	Usov G.I.
	Shvedov S.V.
	Bondarenko V.P.
	Dolgij L.N.
	Labunov V.A.
	Mudry A.V.
Date of publication
	2006
Abstract
	Results of researches of CMOS VLSI RAM 8Ê are presented, made in SoS structures SIMOX and Smart Cut. It is given data on yield, on the photoluminescent analysis of structural perfection of silicon films in SoS structures and results of researches of VLSI stability to radiating influences.
Keywords
	VLSI, silicon-on-sapphire structures
Library reference
	Alieva N.V., Belous A.I., Malyshev V.S., Soroka S.A., Usov G.I., Shvedov S.V., Bondarenko V.P., Dolgij L.N., Labunov V.A., Mudry A.V. Researching VLSI RAM 8Ê on the basis of SoS structures // Problems of Perspective Microelectronic Systems Development - 2006. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2006. P. 289-294.
URL of paper
	http://www.mes-conference.ru/data/year2006/52.pdf