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| Preliminary Processing of Experimental Data in Statistical Integrated Circuit Design |
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| Authors |
| | Malyshev V.S. |
| | Pavlov P.G. |
| | Stempitsky V.R. |
| Date of publication |
| | 2010 |
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| Abstract |
| | Results of investigation, dedicated to selection and practical use of mathematical methods of preliminary processing and statistical analysis of experimental data, obtained in research and development manufacturing of integrated circuits
was presented. |
| Keywords |
| | integrated circuit, submicron technology, субмикронная технология, statistical analysis, statistical distribution, trend, smoothing methods. |
| Library reference |
| | Malyshev V.S., Pavlov P.G., Stempitsky V.R. Preliminary Processing of Experimental Data in Statistical Integrated Circuit Design // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2010. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2010. P. 60-65. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2010/papers/m10-183-20792.pdf |
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