| Mathematical modelling of temperature distribution in thermal microsensors |
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| Authors |
| | Kozlov A.G. |
| Date of publication |
| | 2010 |
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| Abstract |
| | An analytical method is presented that allows one to determine the steady-state temperature distribution in thermal microsensors based on thermally isolated structures with arbitrary rectangular edges. The structure of thermal microsensors is treated as 2D structure with a number of rectangular regions which are classified into some types depending on the boundary conditions at their edges. For each type of the regions, equivalent parameters and heat exchange conditions are determined and the expression for temperature distribution in the region is obtained by means of Fourier method. Heat flux densities between the regions are represented as sums of orthogonal functions with weighting coefficients. The expressions for temperature distribution in the regions contains unknown weighting coefficients whose values are determined from adjoint boundary conditions between all the adjacent regions. The system of equations for the weighting coefficients obtained with the help of the adjoint boundary conditions is that of linear equations. As an example, the determination of the temperature distribution in the microbolometer made by sur-face micromachining is presented. |
| Keywords |
| | thermal microsensors, temperature distribution, Fourier method, microbolometer |
| Library reference |
| | Kozlov A.G. Mathematical modelling of temperature distribution in thermal microsensors // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2010. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2010. P. 76-79. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2010/papers/m10-243-4982.pdf |
