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| Nano-electromechanical thermo-sensitive elements |
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| Authors |
| | Fetisov E.A. |
| | Fedirko V.A. |
| | Khafizov R.Z. |
| | Zolotarev V.I. |
| | Zenyuk D.A. |
| | Rudakov G.A. |
| Date of publication |
| | 2010 |
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| Abstract |
| | The results of development, modeling and experimental study of uncooled IR nano-electromechanical sensors are presented. Their ultimate characteristics are compared with those of deeply cooled IR sensors so they are attractive for various applications as are potentially cheaper. |
| Keywords |
| | IR detectors, MEMS, NEMS, NOEMS, micro-cantilever. |
| Library reference |
| | Fetisov E.A., Fedirko V.A., Khafizov R.Z., Zolotarev V.I., Zenyuk D.A., Rudakov G.A. Nano-electromechanical thermo-sensitive elements // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2010. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2010. P. 638-641. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2010/papers/m10-185-71281.pdf |
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