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Investigation of depencencies of high voltage SOI-MOSFETs safe operating area on structual and process-dependent parameters

Authors
 Chaplygin Yu.A.
 Krupkina T.Yu.
 Krasukov A.Yu.
 Artamonova E.A.
Date of publication
 2010

Abstract
 this article is devoited to investigation of depencencies of high voltage SOI-MOSFETs safe operating area on structual and process-dependent parameters. All dependences were calculated using Synopsys process and device simulation programs – TCAD.
Keywords
 Smart Power Integrated Circuits, high voltage MOSFET, Silicon-On-Insulator, Safe Operating Area.
Library reference
 Chaplygin Yu.A., Krupkina T.Yu., Krasukov A.Yu., Artamonova E.A. Investigation of depencencies of high voltage SOI-MOSFETs safe operating area on structual and process-dependent parameters // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2010. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2010. P. 654-657.
URL of paper
 http://www.mes-conference.ru/data/year2010/papers/m10-52-67771.pdf

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