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Electrostatic planar micromechanical relays
Authors
	Mukhurov N.I.
	Efremov G.I.
	Kotova I.F.
Date of publication
	2008
Abstract
	Results of calculations of operational characteristics of various constructive variants of electrostatic planar micromechanical relays are submitted. Main look-and-feel and mechanism of functioning of electrostatic microrelays are considered. High-precision accuracy of layout of elements is provided due to use alumina technologies and integrated methods of semi-conductor microelectronics. In result reduction of labour input of assembly, low cost of the materials, expanded functionalities MEMS can be achieved on the basis of microswitching devices.
Keywords
	micromechanical relay, electrostatics, planar structure, look-and-feel mechanism of functioning, alumina technologies
Library reference
	Mukhurov N.I., Efremov G.I., Kotova I.F. Electrostatic planar micromechanical relays // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2008. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2008. P. 394-397.
URL of paper
	http://www.mes-conference.ru/data/year2008/73.pdf