| The analysis of dynamic processes of interference distribution in substrates of integrated elements with methods of device-technological simulation |
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| Authors |
| | Krupkina T.Yu. |
| | Rodionov D.V. |
| Date of publication |
| | 2008 |
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| Abstract |
| | It is carried out research of the distributed effects in substrate by means of device-technological simulation TCAD. The equivalent circuits describing interaction of integrated transistor structures through a substrate are proposed. |
| Keywords |
| | interference distribution in substrates of integrated elements, device-technological simulation |
| Library reference |
| | Krupkina T.Yu., Rodionov D.V. The analysis of dynamic processes of interference distribution in substrates of integrated elements with methods of device-technological simulation // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2008. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2008. P. 179-182. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2008/30.pdf |
