| New issues in application of diamond crystals in microelectronics and nanotechnologies |
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| Authors |
| | Karasev V.Yu. |
| | Mozgin A.A. |
| Date of publication |
| | 2006 |
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| Abstract |
| | The new technique of processing of diamond crystals, allowing to form high-quality surfaces for carrying out epitaxial growth processes is represented. The opportunity of use of various diamond surfaces in micro and nano-electronics is considered. |
| Keywords |
| | application of diamond crystals, microelectronics, nanotechnologies |
| Library reference |
| | Karasev V.Yu., Mozgin A.A. New issues in application of diamond crystals in microelectronics and nanotechnologies // Problems of Perspective Microelectronic Systems Development - 2006. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2006. P. 295-299. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2006/53.pdf |
