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| Development of manufacturing techniques of SoI plates |
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| Authors |
| | Komarov F.F. |
| | Milchanin O.V. |
| | Belous A.I. |
| | Malyshev V.S. |
| Date of publication |
| | 2006 |
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| Abstract |
| | In work the opportunity of creation qualitative SoI plates with use of the standard process equipment is shown. Original techniques of preparation of surfaces of plates have been developed for linkage (a combination of plasma, chemical and hydromechanical processings), allowing to receive border of connection of high quality. With use of a multistage set of a doze of implantation of hydrogen, and also additional low-temperature annealing, in work the opportunity of essential decrease of roughness of surface of SoI plates down to 2 nanometers is shown. |
| Keywords |
| | manufacturing SoI plates |
| Library reference |
| | Komarov F.F., Milchanin O.V., Belous A.I., Malyshev V.S. Development of manufacturing techniques of SoI plates // Problems of Perspective Microelectronic Systems Development - 2006. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2006. P. 284-288. |
| URL of paper |
| | http://www.mes-conference.ru/data/year2006/51.pdf |
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