| Investigation of High-Precision Laser Instrument for Fabrication of Integrated Circuits and Monitoring of Seismic and Gravitational Processes |
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| Authors |
| | Minin Iu.B. |
| | Alexandrov D.V. |
| | Dubrov M.N. |
| | Fedorov M.V. |
| Date of publication |
| | 2021 |
| DOI |
| | 10.31114/2078-7707-2021-4-182-186 |
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| Abstract |
| | A new method of interferometric strain measurements was proposed. The method combines possess interferometric precision, does not require external mirror movement through measuring base and is characterized in use of improved signal post-processing by utilizing linearization and digital processing techniques. The proposed method is investigated for achieving accuracy of decades nanometers in a wide dynamic range up to 200 dB with a sensitivity of strain detection of the order of 10-12. |
| Keywords |
| | interferometer, strainmeter, vibrometer |
| Library reference |
| | Minin Iu.B., Alexandrov D.V., Dubrov M.N., Fedorov M.V. Investigation of High-Precision Laser Instrument for Fabrication of Integrated Circuits and Monitoring of Seismic and Gravitational Processes // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2021. Issue 4. P. 182-186. doi:10.31114/2078-7707-2021-4-182-186 |
| URL of paper |
| | http://www.mes-conference.ru/data/year2021/pdf/D082.pdf |
