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Characterization of Micro- and Mesoporous films with the Aid of Adsorption Ellipsometric Porosimetry Method
Authors
	Vorotyntsev D.A.
	Vishnevskiy A.S.
Date of publication
	2021
DOI
	10.31114/2078-7707-2021-4-140-147
Abstract
	The study analyses structure parameters of thin porous films using a method of adsorption ellipsometric porosimetry. This method is based on the ellipsometry method, where parameters such as Ψ and Δ are measured, reflecting changes in the porous structure of the film, which is gradually filled with adsorbate molecules from the vapour-gas mixture. The advantages of this method are relative simplicity, the indestructibility of the film when studying its structure, as well as the ability to evaluate not only the porosity and pore size but also the mechanical properties of the films. However, this method does not apply to dense materials. Several computer programs have been developed to automate measurements and calculate the parameters of the porous structure of films. With their help, more accurate and simple analysis of the main parameters of porous films is realized by obtaining data not only on open porosity and pore size distribution, but also on the average pore size, the half-width of the mesopore size distribution, the refractive index of the skeleton, and the fraction of micropores. It was found that for all its advantages, the method of adsorption ellipsometric porosimetry has several limitations, which are important conditions for its correct operation. It is shown that thermal stabilization of the substrate holder is of particular importance since this directly affects the accuracy of the Young's modulus estimation results. Also, a technique was proposed for assessing the residual moisture in gas by the slope of the modelling straight line, which approximates the dependence of the refractive index on time, which should improve the accuracy of evaluating the porosity values.
Keywords
	adsorption ellipsometric porosimetry, open porosity, pore size, pore size distribution, Young's modulus, thermal stabilization.
Library reference
	Vorotyntsev D.A., Vishnevskiy A.S. Characterization of Micro- and Mesoporous films with the Aid of Adsorption Ellipsometric Porosimetry Method // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2021. Issue 4. P. 140-147. doi:10.31114/2078-7707-2021-4-140-147
URL of paper
	http://www.mes-conference.ru/data/year2021/pdf/D041.pdf