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Investigation of nonlinear effects in modeling the sensor element MEMS-vacuum gauge
Authors
	Volkova E.I.
	Popkov S.A.
Date of publication
	2020
DOI
	10.31114/2078-7707-2020-3-108-113
Abstract
	The design of modern MEMS sensors requires new methods for monitoring the vacuum level in the micro volume where the sensor element is located. Many precision and highly sensitive inertial MEMS sensors with resonant sensor elements need to maintain a high vacuum level to achieve high quality factor, which ensures the stability of the output characteristics. Along with this, the reliability and durability of such devices is affected by the sealing of the sensitive element from the environment. Therefore, monitoring the vacuum level in the areas where the sensor element is located is very important during the entire service life. Due to the very small size of vacuum micro-cavities, standard leak detection methods become insensitive. The authors suggest the design of a MEMS vacuum gauge sensor element that can be integrated into the working volume of the MEMS sensor. The principle of operation of the vacuum gauge is based on measuring the quality factor of the sensor element resonator when the vacuum level changes. In this paper, we consider the problem of finding the quality factor of the MEMS-vacuum sensor element resonator using numerical modeling and analytical estimates. The two most significant mechanisms responsible for the nonlinear effects that may occur during the operation of the sensor element are considered, in particular, the collapse effect due to the action of the electrostatic field - the pull-in effect, a special case of gas-dynamic damping – squeeze film damping effect. These mechanisms were modeled and taken into account during development. The study of the experimental sample proved the correctness of the model calculations during design. The MEMS vacuum gauge sensor element developed by the authors allows to measure the vacuum in the range of measured pressures: 10-3-100 Pa.
Keywords
	MEMS, vacuum gauge, quality factor, resonator, damping, SQFD, pull-in effect.
Library reference
	Volkova E.I., Popkov S.A. Investigation of nonlinear effects in modeling the sensor element MEMS-vacuum gauge // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2020. Issue 3. P. 108-113. doi:10.31114/2078-7707-2020-3-108-113
URL of paper
	http://www.mes-conference.ru/data/year2020/pdf/D076.pdf